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Semiconductor

  • Semiconductor Sealing Solutions Brochure
  • Includes both wet and dry wafer processing
  • Featuring our family of proprietary Simriz® perfluoroelastomer materials and recommendations
  • O-Ring Reference Size Guides (for Semiconductor):
  • Superior™ materials perform between FKM and FFKM
  • Six Sigma Quality for the highest quality parts
  • Materials developed for both wet and dry applications
  • Global manufacturing and support
  • Certification:
    Class 1000 clean room manufacturing and Class 10 cleaning and packaging

  • O-Rings
    • Bell jar seals
    • Chamber lid seals
    • Endpoint windows
    • Gas inlet seals
    • Isolator valve seals
    • KF fittings
    • Slit valve seals
    • Valve seals
    • Window seals

    Magnetic Fluid Seals
    • Substrate rotating shaft seals of LP-CVD and diffusion furnace
    • Transport rotating shaft seals of wafer transport robots

  Metal Bellows
  • Slit valve bellows
  • Gate valve bellows
  • Susceptor list bellows
  • Lifter bellows of wafer transport robots
  • Heater bellows
  • Cassette ports elevator bellows

Rotary Unions
  • Fluid feed-through for CMP and washing process
  • Grinder
  • Washing machine
  • Dicing/cutting saw